The fabrication process of precise 2D Au nanoparticle arrays is presented in this video. The technique is based on the dewetting of Au films on prepatterned substrates. All individual processing steps are presented, from patterning of the substrate by nanoimprint lithography, to deposition of a thin gold film and dewetting, through to the final analysis.
Schaaf Group | Ilmenau University of Technology, Ilmenau, Germany
Professor Dr. Peter Schaaf is head of the research group Materials for Electronics, which belongs to the Institute of Micro- and Nanotechnologies MacroNano at the Ilmenau University of Technology. In addition, he is director of the Institute of Materials Engineering at the Ilmenau University of Technology.
Dr. Dong Wang is staff scientist in the research group Materials for Electronics at the Ilmenau University of Technology. Dr. Ran Ji is applications engineer at SUSS MicroTec in Garching near Munich and is responsible for the development and improvement of nanoimprint processes.
The original research article is published in the Open Access Beilstein Journal of Nanotechnology.
Wang, D.; Ji, R.; Schaaf, P., Formation of precise 2D Au particle arrays via thermally induced dewetting on pre-patterned substrates, Beilstein J. Nanotechnol. 2011, 2, 318–326.
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