Electron-beam-induced deposition – principle and applications

Published on December 13, 2011

In recent years electron-beam-induced deposition (EBID) has shown impressive development as a micro- and nanofabrication tool. A particularly interesting class of materials that can be prepared by EBID is the so called nanogranular metals.


Granular metals are artificial materials that consist of a conducting phase of metallic nanoparticles embedded in a carbon-rich dielectric matrix. The charge transport in such systems is dominated by tunneling between neighboring metallic nanoparticles, which makes them suitable for strain-sensing applications. In the video we demonstrate the basic principle of EBID and the preparation of binary Pt–Si nanostructures. As a practical application, the strain-sensing ability of the deposits is verified by a cantilever-based deflection technique.

Huth Group | Goethe-Universität Frankfurt am Main, Germany

Prof. Dr. Michael Huth is an experimental physicist with long-standing expertise in thin film and correlation physics as well as the EBID process.

Dr. Christian Schwalb is an experimental physicist specializing in the EBID process for the preparation of nanogranular tunneling-resistor sensor elements.

Mr. Marcel Winhold M.Sc. is an experimental physicist specializing in the characterization of EBID deposits especially in charge-transport and transmission electron microscopy measurements.


The original research article is published in the Journal ACS Nano.

Winhold, M.; Schwalb, C. H.; Porrati, F.; Sachser, R.; Frangakis, A. S.; Kämpken, B.; Terfort, A.; Auner, N.; Huth, M. ACS Nano 2011, Article ASAP.

Michael Huth, Fabrizio Porrati, Christian Schwalb, Marcel Winhold, Roland Sachser, Maja Dukic, Jonathan Adams and Georg Fantner. Beilstein J. Nanotechnol. 2012, 3, 597–619 doi:10.3762/bjnano.3.70

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